Study of defects and structural transformations induced by ion irradiation of Y2O3 thin films deposited by Ion Beam Sputtering
- Lacroix, B.
- Paumier, F.
- Jublot, M.
- Pacaud, J.
- Gaboriaud, R.J.
ISSN: 0272-9172
ISBN: 9781615677627
Year of publication: 2008
Volume: 1122
Pages: 60-65
Type: Conference paper