Study of defects and structural transformations induced by ion irradiation of Y2O3 thin films deposited by Ion Beam Sputtering

  1. Lacroix, B.
  2. Paumier, F.
  3. Jublot, M.
  4. Pacaud, J.
  5. Gaboriaud, R.J.
Proceedings:
Materials Research Society Symposium Proceedings

ISSN: 0272-9172

ISBN: 9781615677627

Year of publication: 2008

Volume: 1122

Pages: 60-65

Type: Conference paper

DOI: 10.1557/PROC-1122-O09-04 GOOGLE SCHOLAR