Stoichiometric Control of SiOx Thin Films Grown by Reactive Magnetron Sputtering at Oblique Angles
- Garcia-Valenzuela, A.
- Alvarez, R.
- Lopez-Santos, C.
- Ferrer, F.J.
- Rico, V.
- Guillen, E.
- Alcon-Camas, M.
- Escobar-Galindo, R.
- Gonzalez-Elipe, A.R.
- Palmero, A.
ISSN: 1612-8869, 1612-8850
Argitalpen urtea: 2016
Alea: 13
Zenbakia: 12
Orrialdeak: 1242-1248
Mota: Artikulua