High-Rate Deposition of Stoichiometric Compounds by Reactive Magnetron Sputtering at Oblique Angles

1. Alvarez, R.
2. Garcia-Valenzuela, A.
3. Lopez-Santos, C.
4. Ferrer, F.J.
5. Rico, V.
6. Guillen, E.
7. Alcon-Camas, M.
8. Escobar-Galindo, R.
9. Gonzalez-Elipe, A.R.
10. Palmero, A.