Interfacial effects during the analysis of multilayer metal coatings by radio-frequency glow discharge optical emission spectroscopy Part 1. Crater shape and sputtering rate effects
- Galindo, R.E.
- Forniés, E.
- Albella, J.M.
ISSN: 0267-9477, 1364-5544
Any de publicació: 2005
Volum: 20
Número: 10
Pàgines: 1108-1115
Tipus: Article