Interfacial effects during the analysis of multilayer metal coatings by radio-frequency glow discharge optical emission spectroscopy Part 1. Crater shape and sputtering rate effects

  1. Galindo, R.E.
  2. Forniés, E.
  3. Albella, J.M.
Journal:
Journal of Analytical Atomic Spectrometry

ISSN: 0267-9477,  1364-5544

Year of publication: 2005

Volume: 20

Issue: 10

Pages: 1108-1115

Type: Article

DOI: 10.1039/B502771C GOOGLE SCHOLAR
Data source: Scopus