High-quality carbon nanotube growth at low temperature by pulse-excited remote plasma chemical vapor deposition

  1. Yamazaki, Y.
  2. Sakuma, N.
  3. Katagiri, M.
  4. Suzuki, M.
  5. Sakai, T.
  6. Sato, S.
  7. Nihei, M.
  8. Awano, Y.
Aldizkaria:
Applied Physics Express

ISSN: 1882-0778,  1882-0786

Argitalpen urtea: 2008

Alea: 1

Zenbakia: 3

Orrialdeak: 0340041-0340043

Mota: Artikulua

DOI: 10.1143/APEX.1.034004 GOOGLE SCHOLAR
Datuen iturria: Scopus