Fabrication of gas amplification microstructures with SU8 photosensitive epoxy

  1. Key, M.J.
  2. Llobera, A.
  3. Lozano, M.
  4. Ramos-Lerate, I.
  5. Seidemann, V.
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

ISSN: 0168-9002

Year of publication: 2004

Volume: 525

Issue: 1-2

Pages: 49-52

Type: Conference paper

DOI: 10.1016/J.NIMA.2004.03.023 GOOGLE SCHOLAR