Spectroscopic Ellipsometry Study on Tuning the Electrical and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition

  1. Bohórquez, C.
  2. Bakkali, H.
  3. Delgado, J.J.
  4. Blanco, E.
  5. Herrera, M.
  6. Domínguez, M.
Journal:
ACS Applied Electronic Materials

ISSN: 2637-6113

Year of publication: 2022

Volume: 4

Issue: 3

Pages: 925-935

Type: Article

DOI: 10.1021/ACSAELM.1C01026 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus