Hydrogen implantation-induced blistering in diamond: Toward diamond layer transfer by the Smart Cut™ technique

  1. Masante, C.
  2. de Vecchy, J.
  3. Mazen, F.
  4. Milesi, F.
  5. Di Cioccio, L.
  6. Pernot, J.
  7. Lloret, F.
  8. Araujo, D.
  9. Pinero, J.C.
  10. Rochat, N.
  11. Pierre, F.
  12. Servant, F.
  13. Widiez, J.
Zeitschrift:
Diamond and Related Materials

ISSN: 0925-9635

Datum der Publikation: 2022

Ausgabe: 126

Art: Artikel

DOI: 10.1016/J.DIAMOND.2022.109085 GOOGLE SCHOLAR