Hydrogen implantation-induced blistering in diamond: Toward diamond layer transfer by the Smart Cut™ technique

  1. Masante, C.
  2. de Vecchy, J.
  3. Mazen, F.
  4. Milesi, F.
  5. Di Cioccio, L.
  6. Pernot, J.
  7. Lloret, F.
  8. Araujo, D.
  9. Pinero, J.C.
  10. Rochat, N.
  11. Pierre, F.
  12. Servant, F.
  13. Widiez, J.
Journal:
Diamond and Related Materials

ISSN: 0925-9635

Year of publication: 2022

Volume: 126

Type: Article

DOI: 10.1016/J.DIAMOND.2022.109085 GOOGLE SCHOLAR