Comparison of the thickness determined by Fresnel contrast and Rutherford backscattering spectrometry in ultra-thin layers

  1. Ponce, A
  2. Molina, SI
  3. Garcia-Lopez, J
  4. Battistig, G
Büchersammlung:
MICROSCOPY OF SEMICONDUCTING MATERIALS 2003
  1. Cullis, AG (coord.)
  2. Midgley, PA (coord.)

ISSN: 0951-3248

ISBN: 0-7503-0979-2

Datum der Publikation: 2003

Seiten: 305-308

Kongress: Conference on Microscopy of Semiconducting Materials

Art: Konferenz-Beitrag

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Fuente de los datos: WoS