Comparison of the thickness determined by Fresnel contrast and Rutherford backscattering spectrometry in ultra-thin layers

  1. Ponce, A
  2. Molina, SI
  3. Garcia-Lopez, J
  4. Battistig, G
Liburu bilduma:
MICROSCOPY OF SEMICONDUCTING MATERIALS 2003
  1. Cullis, AG (coord.)
  2. Midgley, PA (coord.)

ISSN: 0951-3248

ISBN: 0-7503-0979-2

Argitalpen urtea: 2003

Orrialdeak: 305-308

Biltzarra: Conference on Microscopy of Semiconducting Materials

Mota: Biltzar ekarpena