Comparison of the thickness determined by Fresnel contrast and Rutherford backscattering spectrometry in ultra-thin layers
- Ponce, A
- Molina, SI
- Garcia-Lopez, J
- Battistig, G
- Cullis, AG (coord.)
- Midgley, PA (coord.)
ISSN: 0951-3248
ISBN: 0-7503-0979-2
Year of publication: 2003
Pages: 305-308
Congress: Conference on Microscopy of Semiconducting Materials
Type: Conference paper