MARIA DEL PILAR
VILLAR CASTRO
Profesora Titular de Universidad
Fernando
Calle Gómez
Publicaciones en las que colabora con Fernando Calle Gómez (4)
2013
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Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM
Microelectronic Engineering, Vol. 112, pp. 193-197
2012
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Optimization of AlN thin layers on diamond substrates for high frequency SAW resonators
Materials Letters, Vol. 66, Núm. 1, pp. 339-342
2011
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Fabrication of high frequency SAW resonators using AlN/Diamond/Si technology
IEEE International Ultrasonics Symposium, IUS
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Sputter optimization of AlN on diamond substrates for high frequency SAW resonators
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011