Física de la Materia Condensada
Department
Center for Scientific Research and Higher Education at Ensenada
Ensenada, MéxicoPublications in collaboration with researchers from Center for Scientific Research and Higher Education at Ensenada (2)
2023
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O3-Annealing Effect on the Etching Resilience of a TiO2/Al2O3 filter Prepared by Atomic Layer Deposition
ACS Applied Materials and Interfaces, Vol. 15, Núm. 34, pp. 40942-40953
2022
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Spectroscopic Ellipsometry Study on Tuning the Electrical and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition
ACS Applied Electronic Materials, Vol. 4, Núm. 3, pp. 925-935