Influence of substrate crystallography on the room temperature synthesis of AlN thin films by reactive sputtering

  1. Iriarte, G.F.
  2. Reyes, D.F.
  3. González, D.
  4. Rodriguez, J.G.
  5. García, R.
  6. Calle, F.
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2011

Volume: 257

Issue: 22

Pages: 9306-9313

Type: Article

DOI: 10.1016/J.APSUSC.2011.05.025 GOOGLE SCHOLAR