Analysis by HR-STEM of the Strain Generation in InP after SiN x Deposition and ICP Etching
- Gutiérrez, M.
- Reyes, D.F.
- Araujo, D.
- Landesman, J.P.
- Pargon, E.
ISSN: 1543-186X, 0361-5235
Year of publication: 2020
Volume: 49
Issue: 9
Pages: 5226-5231
Type: Article