Analysis by HR-STEM of the Strain Generation in InP after SiN x Deposition and ICP Etching

  1. Gutiérrez, M.
  2. Reyes, D.F.
  3. Araujo, D.
  4. Landesman, J.P.
  5. Pargon, E.
Aldizkaria:
Journal of Electronic Materials

ISSN: 1543-186X,  0361-5235

Argitalpen urtea: 2020

Alea: 49

Zenbakia: 9

Orrialdeak: 5226-5231

Mota: Artikulua

DOI: 10.1007/S11664-020-08312-6 GOOGLE SCHOLAR
Datuen iturria: Scopus