High resolution boron content profilometry at δ-doping epitaxial diamond interfaces by CTEM

  1. Piñero, J.C.
  2. Lloret, F.
  3. Alegre, M.P.
  4. Villar, M.P.
  5. Fiori, A.
  6. Bustarret, E.
  7. Araújo, D.
Aldizkaria:
Applied Surface Science

ISSN: 0169-4332

Argitalpen urtea: 2018

Alea: 461

Orrialdeak: 221-226

Mota: Artikulua

DOI: 10.1016/J.APSUSC.2018.07.097 GOOGLE SCHOLAR