Transmission electron microscopy study of ultra-thin SiC layers obtained by rapid thermal carbonization of Si wafers

  1. Morales, F.M.
  2. Molina, S.I.
  3. Araújo, D.
  4. Cimalla, V.
  5. Pezoldt, J.
  6. Barbadillo, L.
  7. Hernández, M.J.
  8. Piqueras, J.
Aldizkaria:
Physica Status Solidi (A) Applied Research

ISSN: 0031-8965

Argitalpen urtea: 2003

Alea: 195

Zenbakia: 1 SPEC

Orrialdeak: 116-121

Mota: Biltzar ekarpena

DOI: 10.1002/PSSA.200306278 GOOGLE SCHOLAR
Datuen iturria: Scopus