Transmission electron microscopy study of ultra-thin SiC layers obtained by rapid thermal carbonization of Si wafers

  1. Morales, F.M.
  2. Molina, S.I.
  3. Araújo, D.
  4. Cimalla, V.
  5. Pezoldt, J.
  6. Barbadillo, L.
  7. Hernández, M.J.
  8. Piqueras, J.
Revue:
Physica Status Solidi (A) Applied Research

ISSN: 0031-8965

Année de publication: 2003

Volumen: 195

Número: 1 SPEC

Pages: 116-121

Type: Communication dans un congrès

DOI: 10.1002/PSSA.200306278 GOOGLE SCHOLAR
La source de données: Scopus