Stress manipulation in CVD grown SiC on Si by mono- and sub-monolayer Ge precoverages
- Pezoldt, J.
- Zgheib, Ch.
- Morales, F.M.
- Förster, Ch.
- Stauden, T.
- Wang, Ch.
- Masri, P.
- Leycuras, A.
- Ferro, G.
- Ambacher, O.
Proceedings:
Proceedings - Electrochemical Society
Year of publication: 2005
Volume: PV 2005-09
Pages: 707-714
Type: Conference paper