Stress manipulation in CVD grown SiC on Si by mono- and sub-monolayer Ge precoverages

  1. Pezoldt, J.
  2. Zgheib, Ch.
  3. Morales, F.M.
  4. Förster, Ch.
  5. Stauden, T.
  6. Wang, Ch.
  7. Masri, P.
  8. Leycuras, A.
  9. Ferro, G.
  10. Ambacher, O.
Proceedings:
Proceedings - Electrochemical Society

Year of publication: 2005

Volume: PV 2005-09

Pages: 707-714

Type: Conference paper