Modulated CNx films prepared by IBAD

  1. Sáfrán, G.
  2. Kolitsch, A.
  3. Malhuitre, S.
  4. Trasobares, S.
  5. Kovács, I.
  6. Geszti, O.
  7. Menyhárd, M.
  8. Colliex, C.
  9. Radnóczi, G.
Journal:
Diamond and Related Materials

ISSN: 0925-9635

Year of publication: 2002

Volume: 11

Issue: 8

Pages: 1552-1559

Type: Article

DOI: 10.1016/S0925-9635(02)00099-7 GOOGLE SCHOLAR
Data source: Scopus