Modulated CNx films prepared by IBAD

  1. Sáfrán, G.
  2. Kolitsch, A.
  3. Malhuitre, S.
  4. Trasobares, S.
  5. Kovács, I.
  6. Geszti, O.
  7. Menyhárd, M.
  8. Colliex, C.
  9. Radnóczi, G.
Revue:
Diamond and Related Materials

ISSN: 0925-9635

Année de publication: 2002

Volumen: 11

Número: 8

Pages: 1552-1559

Type: Article

DOI: 10.1016/S0925-9635(02)00099-7 GOOGLE SCHOLAR