Vertically stacked CMOS-compatible photodiodes for scanning electron microscopy

  1. Gontard, L.C.
  2. Leñero-Bardallo, J.A.
  3. Varela-Feria, F.M.
  4. Carmona-Galán, R.
Proceedings:
Proceedings - IEEE International Symposium on Circuits and Systems

ISSN: 0271-4310

ISBN: 9781728133201

Year of publication: 2020

Volume: 2020-October

Type: Conference paper

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Data source: Scopus