Depth-selective 2D-ACAR studies on low-k dielectric thin films

  1. Eijt, S.W.H.
  2. Van Veen, A.
  3. Falub, C.V.
  4. Escobar Galindo, R.
  5. Schut, H.
  6. Mijnarends, P.E.
  7. De Theije, F.K.
  8. Balkenende, A.R.
Journal:
Radiation Physics and Chemistry

ISSN: 0969-806X

Year of publication: 2003

Volume: 68

Issue: 3-4

Pages: 357-362

Type: Conference paper

DOI: 10.1016/S0969-806X(03)00184-1 GOOGLE SCHOLAR
Data source: Scopus