Fabrication and characterization of planarized carbon nanotube via interconnects

  1. Katagiri, M.
  2. Wada, M.
  3. Ito, B.
  4. Yamazaki, Y.
  5. Suzuki, M.
  6. Kitamura, M.
  7. Saito, T.
  8. Isobayashi, A.
  9. Sakata, A.
  10. Sakuma, N.
  11. Kajita, A.
  12. Sakai, T.
Journal:
Japanese Journal of Applied Physics

ISSN: 0021-4922,  1347-4065

Year of publication: 2012

Volume: 51

Issue: 5 PART 2

Type: Conference paper

DOI: 10.1143/JJAP.51.05ED02 GOOGLE SCHOLAR
Data source: Scopus