Fabrication and characterization of planarized carbon nanotube via interconnects

  1. Katagiri, M.
  2. Wada, M.
  3. Ito, B.
  4. Yamazaki, Y.
  5. Suzuki, M.
  6. Kitamura, M.
  7. Saito, T.
  8. Isobayashi, A.
  9. Sakata, A.
  10. Sakuma, N.
  11. Kajita, A.
  12. Sakai, T.
Revue:
Japanese Journal of Applied Physics

ISSN: 0021-4922,  1347-4065

Année de publication: 2012

Volumen: 51

Número: 5 PART 2

Type: Communication dans un congrès

DOI: 10.1143/JJAP.51.05ED02 GOOGLE SCHOLAR
La source de données: Scopus