Effects of growth parameters on oxygen incorporation into InGaAiP grown by metalorganic chemical vapor deposition

  1. Nishikawa, Yukie
  2. Suzuki, Mariko
  3. Okajima, Masaki
Konferenzberichte:
Conference on Solid State Devices and Materials

Datum der Publikation: 1992

Seiten: 293-295

Art: Konferenz-Beitrag