Effects of growth parameters on oxygen incorporation into InGaAiP grown by metalorganic chemical vapor deposition

  1. Nishikawa, Yukie
  2. Suzuki, Mariko
  3. Okajima, Masaki
Actas:
Conference on Solid State Devices and Materials

Ano de publicación: 1992

Páxinas: 293-295

Tipo: Achega congreso