Effects of growth parameters on oxygen incorporation into InGaAiP grown by metalorganic chemical vapor deposition

  1. Nishikawa, Yukie
  2. Suzuki, Mariko
  3. Okajima, Masaki
Actes de conférence:
Conference on Solid State Devices and Materials

Année de publication: 1992

Pages: 293-295

Type: Communication dans un congrès