Boron concentration profiling by high angle annular dark field-scanning transmission electron microscopy in homoepitaxial δ-doped diamond layers
- Araújo, D.
- Alegre, M.P.
- Piñero, J.C.
- Fiori, A.
- Bustarret, E.
- Jomard, F.
Journal:
Applied Physics Letters
ISSN: 0003-6951
Year of publication: 2013
Volume: 103
Issue: 4
Type: Article