Boron concentration profiling by high angle annular dark field-scanning transmission electron microscopy in homoepitaxial δ-doped diamond layers
- Araújo, D.
- Alegre, M.P.
- Piñero, J.C.
- Fiori, A.
- Bustarret, E.
- Jomard, F.
Revue:
Applied Physics Letters
ISSN: 0003-6951
Année de publication: 2013
Volumen: 103
Número: 4
Type: Article
