Magnetron sputtered AlN layers on LTCC multilayer and silicon substrates

  1. Bartsch, H.
  2. Grieseler, R.
  3. Mánuel, J.
  4. Pezoldt, J.
  5. Müller, J.
Journal:
Coatings

ISSN: 2079-6412

Year of publication: 2018

Volume: 8

Issue: 8

Type: Article

DOI: 10.3390/COATINGS8080289 GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus