Magnetron sputtered AlN layers on LTCC multilayer and silicon substrates
- Bartsch, H.
- Grieseler, R.
- Mánuel, J.
- Pezoldt, J.
- Müller, J.
Revue:
Coatings
ISSN: 2079-6412
Année de publication: 2018
Volumen: 8
Número: 8
Type: Article