Cluster Tool for in Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures

  1. Wenisch, R.
  2. Lungwitz, F.
  3. Hanf, D.
  4. Heller, R.
  5. Zscharschuch, J.
  6. Hübner, R.
  7. Von Borany, J.
  8. Abrasonis, G.
  9. Gemming, S.
  10. Escobar-Galindo, R.
  11. Krause, M.
Journal:
Analytical Chemistry

ISSN: 1520-6882,  0003-2700

Year of publication: 2018

Volume: 90

Issue: 13

Pages: 7837-7842

Type: Article

DOI: 10.1021/ACS.ANALCHEM.8B00923 GOOGLE SCHOLAR
Data source: Scopus