Cluster Tool for in Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures

  1. Wenisch, R.
  2. Lungwitz, F.
  3. Hanf, D.
  4. Heller, R.
  5. Zscharschuch, J.
  6. Hübner, R.
  7. Von Borany, J.
  8. Abrasonis, G.
  9. Gemming, S.
  10. Escobar-Galindo, R.
  11. Krause, M.
Revue:
Analytical Chemistry

ISSN: 1520-6882,  0003-2700

Année de publication: 2018

Volumen: 90

Número: 13

Pages: 7837-7842

Type: Article

DOI: 10.1021/ACS.ANALCHEM.8B00923 GOOGLE SCHOLAR
La source de données: Scopus