Growth of CrNx films by DC reactive magnetron sputtering at constant N2/Ar gas flow

  1. Forniés, E.
  2. Escobar Galindo, R.
  3. Sánchez, O.
  4. Albella, J.M.
Journal:
Surface and Coatings Technology

ISSN: 0257-8972

Year of publication: 2006

Volume: 200

Issue: 20-21

Pages: 6047-6053

Type: Article

DOI: 10.1016/J.SURFCOAT.2005.09.020 GOOGLE SCHOLAR
Data source: Scopus