Growth of CrNx films by DC reactive magnetron sputtering at constant N2/Ar gas flow
- Forniés, E.
- Escobar Galindo, R.
- Sánchez, O.
- Albella, J.M.
ISSN: 0257-8972
Argitalpen urtea: 2006
Alea: 200
Zenbakia: 20-21
Orrialdeak: 6047-6053
Mota: Artikulua