Porosity in silicon and silica thin films monitored by positrons and positronium

  1. Van Veen, A.
  2. Galindo, R.E.
  3. Eijt, S.W.H.
  4. Schut, H.
  5. Van Gog, H.
  6. Balkenende, A.R.
  7. De Theije, F.K.
Book Series:
Materials Science Forum

ISSN: 1662-9752,  0255-5476

ISBN: 9780878499366

Year of publication: 2004

Volume: 445-446

Pages: 254-258

Type: Conference paper

DOI: 10.4028/WWW.SCIENTIFIC.NET/MSF.445-446.254 GOOGLE SCHOLAR
Data source: Scopus