Texture in ITO films deposited at oblique incidence by ion beam sputtering

  1. Lacroix, B.
  2. Paumier, F.
  3. Santos, A.J.
  4. Maudet, F.
  5. Girardeau, T.
  6. Dupeyrat, C.
  7. García, R.
  8. Morales, F.M.
Revista:
Applied Surface Science

ISSN: 0169-4332

Any de publicació: 2022

Volum: 605

Tipus: Article

DOI: 10.1016/J.APSUSC.2022.154677 GOOGLE SCHOLAR lock_openAccés obert editor
Font de les dades: Scopus