Texture in ITO films deposited at oblique incidence by ion beam sputtering

  1. Lacroix, B.
  2. Paumier, F.
  3. Santos, A.J.
  4. Maudet, F.
  5. Girardeau, T.
  6. Dupeyrat, C.
  7. García, R.
  8. Morales, F.M.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2022

Volume: 605

Type: Article

DOI: 10.1016/J.APSUSC.2022.154677 GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus