Texture in ITO films deposited at oblique incidence by ion beam sputtering

  1. Lacroix, B.
  2. Paumier, F.
  3. Santos, A.J.
  4. Maudet, F.
  5. Girardeau, T.
  6. Dupeyrat, C.
  7. García, R.
  8. Morales, F.M.
Revista:
Applied Surface Science

ISSN: 0169-4332

Ano de publicación: 2022

Volume: 605

Tipo: Artigo

DOI: 10.1016/J.APSUSC.2022.154677 GOOGLE SCHOLAR lock_openAcceso aberto editor