Synthesis and characterization of zirconium oxynitride ZrO xNy coatings deposited via unbalanced DC magnetron sputtering

  1. Cubillos, G.I.
  2. Olaya, J.J.
  3. Bethencourt, M.
  4. Antorrena, G.
  5. El Amrani, K.
Journal:
Materials Chemistry and Physics

ISSN: 0254-0584

Year of publication: 2013

Volume: 141

Issue: 1

Pages: 42-51

Type: Article

DOI: 10.1016/J.MATCHEMPHYS.2013.04.012 GOOGLE SCHOLAR
Data source: Scopus