Synthesis and characterization of zirconium oxynitride ZrO xNy coatings deposited via unbalanced DC magnetron sputtering

  1. Cubillos, G.I.
  2. Olaya, J.J.
  3. Bethencourt, M.
  4. Antorrena, G.
  5. El Amrani, K.
Revue:
Materials Chemistry and Physics

ISSN: 0254-0584

Année de publication: 2013

Volumen: 141

Número: 1

Pages: 42-51

Type: Article

DOI: 10.1016/J.MATCHEMPHYS.2013.04.012 GOOGLE SCHOLAR
La source de données: Scopus