SIMS investigation of the influence of Ge pre-deposition on the interface quality between SiC and Si

  1. Pezoldt, J.
  2. Zgheib, Ch.
  3. Masri, P.
  4. Averous, M.
  5. Morales, F.M.
  6. Kosiba, R.
  7. Ecke, G.
  8. Weih, P.
  9. Ambacher, O.
Journal:
Surface and Interface Analysis

ISSN: 0142-2421

Year of publication: 2004

Volume: 36

Issue: 8

Pages: 969-972

Type: Conference paper

DOI: 10.1002/SIA.1814 GOOGLE SCHOLAR
Data source: Scopus