SIMS investigation of the influence of Ge pre-deposition on the interface quality between SiC and Si

  1. Pezoldt, J.
  2. Zgheib, Ch.
  3. Masri, P.
  4. Averous, M.
  5. Morales, F.M.
  6. Kosiba, R.
  7. Ecke, G.
  8. Weih, P.
  9. Ambacher, O.
Aldizkaria:
Surface and Interface Analysis

ISSN: 0142-2421

Argitalpen urtea: 2004

Alea: 36

Zenbakia: 8

Orrialdeak: 969-972

Mota: Biltzar ekarpena

DOI: 10.1002/SIA.1814 GOOGLE SCHOLAR
Datuen iturria: Scopus