SIMS investigation of the influence of Ge pre-deposition on the interface quality between SiC and Si

  1. Pezoldt, J.
  2. Zgheib, Ch.
  3. Masri, P.
  4. Averous, M.
  5. Morales, F.M.
  6. Kosiba, R.
  7. Ecke, G.
  8. Weih, P.
  9. Ambacher, O.
Revue:
Surface and Interface Analysis

ISSN: 0142-2421

Année de publication: 2004

Volumen: 36

Número: 8

Pages: 969-972

Type: Communication dans un congrès

DOI: 10.1002/SIA.1814 GOOGLE SCHOLAR
La source de données: Scopus