Stress reduction in a-C:H coatings through the addition of nitrogen to the feed gas

  1. Rabbani, F.
  2. Escobar Galindo, R.
  3. Arnoldbik, W.M.
  4. van der Zwaag, S.
  5. van Veen, A.
  6. Schut, H.
Journal:
Diamond and Related Materials

ISSN: 0925-9635

Year of publication: 2004

Volume: 13

Issue: 9

Pages: 1645-1657

Type: Article

DOI: 10.1016/J.DIAMOND.2004.02.003 GOOGLE SCHOLAR
Data source: Scopus