Stress reduction in a-C:H coatings through the addition of nitrogen to the feed gas

  1. Rabbani, F.
  2. Escobar Galindo, R.
  3. Arnoldbik, W.M.
  4. van der Zwaag, S.
  5. van Veen, A.
  6. Schut, H.
Aldizkaria:
Diamond and Related Materials

ISSN: 0925-9635

Argitalpen urtea: 2004

Alea: 13

Zenbakia: 9

Orrialdeak: 1645-1657

Mota: Artikulua

DOI: 10.1016/J.DIAMOND.2004.02.003 GOOGLE SCHOLAR